Christofer Hierold: Catalogue data in Spring Semester 2012

Name Prof. Dr. Christofer Hierold
FieldMikro- und Nanosysteme
Address
Chair in Micro and Nanosystems
ETH Zürich, CLA G 9
Tannenstrasse 3
8092 Zürich
SWITZERLAND
Telephone+41 44 632 31 43
Fax+41 44 632 14 62
E-mailchristofer.hierold@micro.mavt.ethz.ch
DepartmentMechanical and Process Engineering
RelationshipFull Professor

NumberTitleECTSHoursLecturers
151-0140-00LFocused Study: Selected Topics in Research and Application in Micro and Nanosystems B Restricted registration - show details 1 credit1SC. Hierold
AbstractIndependent studies on a defined field in micro- and nanosystems.
ObjectiveIndependent studies on a defined field in micro- and nanosystems.
151-0172-00LDevices and Systems Information 5 credits4GC. Hierold, A. Hierlemann
AbstractThe students are introduced to the fundamentals and physics of microelectronic devices as well as to microsystems in general (MEMS). They will be able to apply this knowledge for system research and development and to assess and apply principles, concepts and methods from a broad range of technical and scientific disciplines for innovative products.
ObjectiveThe students are introduced to the fundamentals and physics of microelectronic devices as well as to microsystems in general (MEMS), basic electronic circuits for sensors, RF-MEMS, chemical microsystems, BioMEMS and microfluidics, magnetic sensors and optical devices, and in particular to the concepts of Nanosystems (focus on carbon nanotubes), based on the respective state-of-research in the field. They will be able to apply this knowledge for system research and development and to assess and apply principles, concepts and methods from a broad range of technical and scientific disciplines for innovative products.
ContentIntroduction to semiconductors, MOSFET transistors
Basic electronic circuits for sensors and microsystems
Transducer Fundamentals
Chemical sensors and biosensors, microfluidics and bioMEMS
RF MEMS
Magnetic Sensors, optical Devices
Nanosystem concepts
Lecture noteshandouts
151-0620-00LEmbedded MEMS Lab Information 5 credits9PC. Hierold, S. Blunier, O. Kurapova
AbstractPractical course: Students are introduced to the process steps required for the fabrication of MEMS (Micro Electro Mechanical System) and carry out the fabrication and testing steps in the clean rooms themselves. Additionally, they learn the requirements for working in clean rooms. Processing and characterization will be documented and analyzed in a final report. Limited access, see "Besonderes."
ObjectiveStudents learn the individual process steps that are required to make a MEMS (Micro Electro Mechanical System). Students carry out the process steps themselves in laboratories and clean rooms. Furthermore, participants become familiar with the special requirements (cleanliness, safety, operation of equipment and handling hazardous chemicals) of working in the clean rooms and laboratories. The entire production, processing, and characterization of the MEMS is documented and evaluated in a final report.
ContentWith guidance from a tutor, the individual silicon microsystem process steps that are required for the fabrication of an accelerometer are carried out:
- Photolithography, dry etching, wet etching, sacrificial layer etching, critical point drying, various cleaning procedures
- Packaging and electrical connection of a MEMS device
- Testing and characterization of the MEMS device
- Written documentation and evaluation of the entire production, processing and characterization
Lecture notesA document containing theory, background and practical course content is distributed in the informational meeting.
LiteratureThe document provides sufficient information for the participants to successfully participate in the course.
Prerequisites / NoticeParticipating students are required to attend all scheduled meetings of the course. Participating students are required to provide proof that they have personal accident insurance prior to the start of the laboratory portion of the course.

This master's level course is limited to 15 students per semester for safety and efficiency reasons. In the past semesters, all enrolled students have been able to participate since there were less than 15. However, if there are more than 15 registered, we regret to restrict access to this course by the following rules:
Priority 1: master students of the master's program in "Micro and Nanosystems"

Priority 2: master students of the master’s program in “Mechanical Engineering” with a specialization in Nanoscale Engineering (MAVT-tutors Profs Dual, Hierold, Nelson, Poulikakos, Pratsinis, Stemmer), who attended the bachelor course “Microsystems Technology” successfully (Testatbedingung fulfilled)

Priority 3: master students (8th semester of a diploma program or 2nd semester of a master’s program), who attended the bachelor course “Microsystems Technology” successfully (Testatbedingung fulfilled)

Priority 4: all other students (PhD, bachelor), who attended the bachelor course “Microsystems Technology” successfully (Testatbedingung fulfilled)

If there are more students in one of these priority groups than places available, we will decide by drawing lots.
Students will be notified at the first meeting of the course as to whether they are able to participate.
151-0642-00LSeminar on Micro and Nanosystems0 credits1SC. Hierold
AbstractScientific presentations from the field of Micro- and Nanosystems
ObjectiveThe students will be informed about the latest news from the state-of-the-art in the field and will take the opportunity to start scientific and challenging discussions with the presenters.
ContentSelected and hot topics from Micro- and Nanosystems, progress reports from PhD projects.