Name | Prof. Dr. Andreas Hierlemann |
Name variants | A Hierlemann |
Field | Biosystems Engineering |
Address | Dep. Biosysteme ETH Zürich, BSS G 53.1 Klingelbergstrasse 48 4056 Basel SWITZERLAND |
Telephone | +41 61 387 31 50 |
Fax | +41 61 387 39 92 |
andreas.hierlemann@bsse.ethz.ch | |
URL | https://bsse.ethz.ch/bel |
Department | Biosystems Science and Engineering |
Relationship | Full Professor |
Number | Title | ECTS | Hours | Lecturers | |
---|---|---|---|---|---|
151-0172-00L | Devices and Systems | 5 credits | 4G | C. Hierold, A. Hierlemann | |
Abstract | The students are introduced to the fundamentals and physics of microelectronic devices as well as to microsystems in general (MEMS). They will be able to apply this knowledge for system research and development and to assess and apply principles, concepts and methods from a broad range of technical and scientific disciplines for innovative products. | ||||
Objective | The students are introduced to the fundamentals and physics of microelectronic devices as well as to microsystems in general (MEMS), basic electronic circuits for sensors, RF-MEMS, chemical microsystems, BioMEMS and microfluidics, magnetic sensors and optical devices, and in particular to the concepts of Nanosystems (focus on carbon nanotubes), based on the respective state-of-research in the field. They will be able to apply this knowledge for system research and development and to assess and apply principles, concepts and methods from a broad range of technical and scientific disciplines for innovative products. | ||||
Content | Introduction to semiconductors, MOSFET transistors Basic electronic circuits for sensors and microsystems Transducer Fundamentals Chemical sensors and biosensors, microfluidics and bioMEMS RF MEMS Magnetic Sensors, optical Devices Nanosystem concepts | ||||
Lecture notes | handouts | ||||
636-0004-00L | Microsensors and Microsystems | 6 credits | 3G | A. Hierlemann | |
Abstract | Students are introduced to microsensor and microsystem technology, the different materials and micromachining and fabrication techniques. They become acquainted with fundamentals of different transducers, fundamentals of relevant circuitry units, and strategies to integrate these components into microdevices and microsystems. | ||||
Objective | Students are introduced to microsensor and microsystem technology. The students will get to know the different materials (silicon, glass, plastics) and the respective micromachining and fabrication techniques. They will become acquainted with the fundamentals of the different transducers (e.g., mechanical, thermal, magnetic, chemical, optical, biosensors) and the fundamentals of relevant circuitry units. Finally they will get to know strategies to integrate these components into microdevices and microsystems. For silicon-based devices fabrication steps pertaining to the defined sequence of batch processing in semiconductor and microelectronics industry can be partially used as well as dedicated microfabrication technologies and processes. The microfluidic and chemical or biological microsystems also include plastic or glass microstructures. | ||||
Content | Introduction to microensors and microsystems # Brief introduction to semiconductors # Silicon and glass micromachining # Wafer bonding # Plastic materials and their micromachining # Fundamentals of different transducers # Basic electronic circuits for sensors and microsystems # Mechanical sensors # Thermal sensors # Magnetic sensors # Optical devices # Chemical and biosensors # Microfluidics # BioMEMS | ||||
Lecture notes | Handouts in English | ||||
Literature | - S.M. Sze, "Semiconductor Devices, Physics and Technology", 2nd edition, Wiley, 2002 - W. Menz, J. Mohr, O. Paul, “Microsystem Technology”, Wiley-VCH, 2001 - G. T. A. Kovacs, “Micromachined Transducers Sourcebook”, McGraw-Hill, 1998 - M. J. Madou, “Fundamentals of Microfabrication", 2nd ed., CRC Press, 2002 - S.A. Campbell, "The Science and Engineering of Microelectronic Fabrication", 2nd edition, Oxford University Press, 2001 | ||||
Prerequisites / Notice | URL: www.bel.ethz.ch | ||||
636-0301-00L | Current Topics in Biosystems Science and Engineering | 2 credits | 1S | D. Iber, N. Beerenwinkel, M. Fussenegger, A. Hierlemann, S. Panke, R. Paro, J. Stelling | |
Abstract | This seminar will feature invited lectures about recent advances and developments in systems biology, including topics from biology, bioengineering, and computational biology. | ||||
Objective | To provide an overview of current systems biology research. | ||||
Content | The final list of topics will be available at http://www.bsse.ethz.ch/education/. |