Andreas Hierlemann: Catalogue data in Spring Semester 2012

Award: The Golden Owl
Name Prof. Dr. Andreas Hierlemann
Name variantsA Hierlemann
FieldBiosystems Engineering
Address
Dep. Biosysteme
ETH Zürich, BSS G 53.1
Klingelbergstrasse 48
4056 Basel
SWITZERLAND
Telephone+41 61 387 31 50
Fax+41 61 387 39 92
E-mailandreas.hierlemann@bsse.ethz.ch
URLhttps://bsse.ethz.ch/bel
DepartmentBiosystems Science and Engineering
RelationshipFull Professor

NumberTitleECTSHoursLecturers
151-0172-00LDevices and Systems Information 5 credits4GC. Hierold, A. Hierlemann
AbstractThe students are introduced to the fundamentals and physics of microelectronic devices as well as to microsystems in general (MEMS). They will be able to apply this knowledge for system research and development and to assess and apply principles, concepts and methods from a broad range of technical and scientific disciplines for innovative products.
ObjectiveThe students are introduced to the fundamentals and physics of microelectronic devices as well as to microsystems in general (MEMS), basic electronic circuits for sensors, RF-MEMS, chemical microsystems, BioMEMS and microfluidics, magnetic sensors and optical devices, and in particular to the concepts of Nanosystems (focus on carbon nanotubes), based on the respective state-of-research in the field. They will be able to apply this knowledge for system research and development and to assess and apply principles, concepts and methods from a broad range of technical and scientific disciplines for innovative products.
ContentIntroduction to semiconductors, MOSFET transistors
Basic electronic circuits for sensors and microsystems
Transducer Fundamentals
Chemical sensors and biosensors, microfluidics and bioMEMS
RF MEMS
Magnetic Sensors, optical Devices
Nanosystem concepts
Lecture noteshandouts
636-0004-00LMicrosensors and Microsystems6 credits3GA. Hierlemann
AbstractStudents are introduced to microsensor and microsystem technology, the different materials and micromachining and fabrication techniques. They become acquainted with fundamentals of different transducers, fundamentals of relevant circuitry units, and strategies to integrate these components into microdevices and microsystems.
ObjectiveStudents are introduced to microsensor and microsystem technology. The students will get to know the different materials (silicon, glass, plastics) and the respective micromachining and fabrication techniques. They will become acquainted with the fundamentals of the different transducers (e.g., mechanical, thermal, magnetic, chemical, optical, biosensors) and the fundamentals of relevant circuitry units. Finally they will get to know strategies to integrate these components into microdevices and microsystems.
For silicon-based devices fabrication steps pertaining to the defined sequence of batch processing in semiconductor and microelectronics industry can be partially used as well as dedicated microfabrication technologies and processes. The microfluidic and chemical or biological microsystems also include plastic or glass microstructures.
ContentIntroduction to microensors and microsystems

# Brief introduction to semiconductors
# Silicon and glass micromachining
# Wafer bonding
# Plastic materials and their micromachining
# Fundamentals of different transducers
# Basic electronic circuits for sensors and microsystems
# Mechanical sensors
# Thermal sensors
# Magnetic sensors
# Optical devices
# Chemical and biosensors
# Microfluidics
# BioMEMS
Lecture notesHandouts in English
Literature- S.M. Sze, "Semiconductor Devices, Physics and Technology", 2nd edition, Wiley, 2002
- W. Menz, J. Mohr, O. Paul, “Microsystem Technology”, Wiley-VCH, 2001
- G. T. A. Kovacs, “Micromachined Transducers Sourcebook”, McGraw-Hill, 1998
- M. J. Madou, “Fundamentals of Microfabrication", 2nd ed., CRC Press, 2002
- S.A. Campbell, "The Science and Engineering of Microelectronic Fabrication", 2nd edition, Oxford University Press, 2001
Prerequisites / NoticeURL: www.bel.ethz.ch
636-0301-00LCurrent Topics in Biosystems Science and Engineering2 credits1SD. Iber, N. Beerenwinkel, M. Fussenegger, A. Hierlemann, S. Panke, R. Paro, J. Stelling
AbstractThis seminar will feature invited lectures about recent advances and developments in systems biology, including topics from biology, bioengineering, and computational biology.
ObjectiveTo provide an overview of current systems biology research.
ContentThe final list of topics will be available at http://www.bsse.ethz.ch/education/.