Andreas Hierlemann: Catalogue data in Autumn Semester 2016

Award: The Golden Owl
Name Prof. Dr. Andreas Hierlemann
Name variantsA Hierlemann
FieldBiosystems Engineering
Address
Dep. Biosysteme
ETH Zürich, BSS G 53.1
Klingelbergstrasse 48
4056 Basel
SWITZERLAND
Telephone+41 61 387 31 50
Fax+41 61 387 39 92
E-mailandreas.hierlemann@bsse.ethz.ch
URLhttps://bsse.ethz.ch/bel
DepartmentBiosystems Science and Engineering
RelationshipFull Professor

NumberTitleECTSHoursLecturers
636-0020-00LMicrotechnology and Microelectronics
Prerequisites: Physics I and Physics II highly recommended.
6 credits3GA. Hierlemann
AbstractStudents are introduced to the basics of semiconductors, microelectronics, microtechnology, and silicon process technology. They will get to know the fabrication of silicon-based microdevices and -systems by a sequence of defined batch processing steps as well as dedicated microfabrication processes.
ObjectiveStudents are introduced to the basics of semiconductors, microelectronics, microtechnology, and silicon process technology. They will get to know the different fabrication methods for various microdevices and systems.
ContentIntroduction to semiconductors, microelectronics, microtechnology, and micro electro mechanical systems (MEMS)

• Fundamentals of semiconductors
• Basics of microelectronics: transistor and diode.
• Silicon processing and fabrication steps
• Silicon crystal structure and manufacturing
• Thermal oxidation
• Doping via diffusion and ion implantation
• Photolithography
• Thin film deposition: dielectrics and metals
• Wet etching & bulk micromachining
• Dry etching & surface micromachining
• Microelectronics processing and fabrication sequence
• Packaging
Lecture notesHandouts in English
Literature- S.M. Sze, "Semiconductor Devices, Physics and Technology", 2nd edition, Wiley, 2002
- R.F. Pierret, "Semiconductor Device Fundamentals", Addison Wesley, 1996
- R. C. Jaeger, "Introduction to Microelectronic Fabrication", Prentice Hall 2002
- S.A. Campbell, "The Science and Engineering of Microelectronic Fabrication", 2nd edition, Oxford University Press, 2001
- W. Menz, J. Mohr, O. Paul, “Microsystem Technology”, Wiley-VCH, 2001
- G. T. A. Kovacs, “Micromachined Transducers Sourcebook”, McGraw-Hill, 1998
- M. J. Madou, “Fundamentals of Microfabrication", 2nd ed., CRC Press, 2002
Prerequisites / NoticeThe information on the web can be updated until the beginning of the semester.
636-0301-00LCurrent Topics in Biosystems Science and Engineering2 credits1ST. Stadler, N. Beerenwinkel, Y. Benenson, K. M. Borgwardt, P. S. Dittrich, M. Fussenegger, A. Hierlemann, D. Iber, M. H. Khammash, D. J. Müller, S. Panke, P. Pantazis, R. Paro, R. Platt, S. Reddy, T. Schroeder, J. Stelling
AbstractThis seminar will feature invited lectures about recent advances and developments in systems biology, including topics from biology, bioengineering, and computational biology.
ObjectiveTo provide an overview of current systems biology research.
ContentThe final list of topics will be available at http://www.bsse.ethz.ch/education/.