The spring semester 2021 will take place online until further notice. Exceptions: Courses that can only be carried out with on-site presence. Please note the information provided by the lecturers.

Miroslav Haluska: Course units in Autumn Semester 2016

Name Dr. Miroslav Haluska
Chair in Micro and Nanosystems
ETH Zürich, CLA G 1.2
Tannenstrasse 3
8092 Zürich
Telephone+41 44 632 76 40
DepartmentMechanical and Process Engineering

151-0620-00LEmbedded MEMS Lab Information 5 credits3PC. Hierold, S. Blunier, M. Haluska
151-0621-00LMicrosystems Technology Information 6 credits4GC. Hierold, M. Haluska