Miroslav Haluska: Course units in Autumn Semester 2017

Name Dr. Miroslav Haluska
Address
Chair in Micro and Nanosystems
ETH Zürich, CLA G 3
Tannenstrasse 3
8092 Zürich
SWITZERLAND
Telephone+41 77 213 45 45
E-mailhaluska@micro.mavt.ethz.ch
DepartmentMechanical and Process Engineering
RelationshipLecturer

NumberTitleECTSHoursLecturers
151-0620-00LEmbedded MEMS Lab Information 5 credits3PC. Hierold, S. Blunier, M. Haluska
151-0621-00LMicrosystems I: Process Technology and Integration Information 6 credits3V + 3UM. Haluska, C. Hierold