Miroslav Haluska: Catalogue data in Autumn Semester 2014 |
Name | Dr. Miroslav Haluska |
Address | Chair in Micro and Nanosystems ETH Zürich, CLA G 3 Tannenstrasse 3 8092 Zürich SWITZERLAND |
Telephone | +41 44 632 76 40 |
haluska@micro.mavt.ethz.ch | |
Department | Mechanical and Process Engineering |
Relationship | Lecturer |
Number | Title | ECTS | Hours | Lecturers | |
---|---|---|---|---|---|
151-0621-00L | Microsystems Technology | 6 credits | 4G | C. Hierold, M. Haluska | |
Abstract | Students are introduced to the basics of micromachining and silicon process technology and will learn about the fabrication of microsystems and -devices by a sequence of defined processing steps (process flow). | ||||
Objective | Students are introduced to the basics of micromachining and silicon process technology and will understand the fabrication of microsystem devices by the combination of unit process steps ( = process flow). | ||||
Content | - Introduction to microsystems technology (MST) and micro electro mechanical systems (MEMS) - Basic silicon technologies: Thermal oxidation, photolithography and etching, diffusion and ion implantation, thin film deposition. - Specific microsystems technologies: Bulk and surface micromachining, dry and wet etching, isotropic and anisotropic etching, beam and membrane formation, wafer bonding, thin film mechanical and thermal properties, piezoelectric and piezoresitive materials. - Selected microsystems: Mechanical sensors and actuators, microresonators, thermal sensors and actuators, system integration and encapsulation. | ||||
Lecture notes | Handouts (available online) | ||||
Literature | - S.M. Sze: Semiconductor Devices, Physics and Technology - W. Menz, J. Mohr, O.Paul: Microsystem Technology - G. Kovacs: Micromachined Transducer Sourcebook | ||||
Prerequisites / Notice | Prerequisites: Physics I and II |