Miroslav Haluska: Catalogue data in Autumn Semester 2014

Name Dr. Miroslav Haluska
Address
Chair in Micro and Nanosystems
ETH Zürich, CLA G 3
Tannenstrasse 3
8092 Zürich
SWITZERLAND
Telephone+41 44 632 76 40
E-mailhaluska@micro.mavt.ethz.ch
DepartmentMechanical and Process Engineering
RelationshipLecturer

NumberTitleECTSHoursLecturers
151-0621-00LMicrosystems Technology Information 6 credits4GC. Hierold, M. Haluska
AbstractStudents are introduced to the basics of micromachining and silicon process technology and will learn about the fabrication of microsystems and -devices by a sequence of defined processing steps (process flow).
ObjectiveStudents are introduced to the basics of micromachining and silicon process technology and will understand the fabrication of microsystem devices by the combination of unit process steps ( = process flow).
Content- Introduction to microsystems technology (MST) and micro electro mechanical systems (MEMS)
- Basic silicon technologies: Thermal oxidation, photolithography and etching, diffusion and ion implantation, thin film deposition.
- Specific microsystems technologies: Bulk and surface micromachining, dry and wet etching, isotropic and anisotropic etching, beam and membrane formation, wafer bonding, thin film mechanical and thermal properties, piezoelectric and piezoresitive materials.
- Selected microsystems: Mechanical sensors and actuators, microresonators, thermal sensors and actuators, system integration and encapsulation.
Lecture notesHandouts (available online)
Literature- S.M. Sze: Semiconductor Devices, Physics and Technology
- W. Menz, J. Mohr, O.Paul: Microsystem Technology
- G. Kovacs: Micromachined Transducer Sourcebook
Prerequisites / NoticePrerequisites: Physics I and II