402-0318-00L Semiconductor Materials: Characterization, Processing and Devices
Semester | Frühjahrssemester 2015 |
Dozierende | S. Schön, W. Wegscheider |
Periodizität | jährlich wiederkehrende Veranstaltung |
Lehrsprache | Englisch |
Kurzbeschreibung | This course gives an introduction into the fundamentals of semiconductor materials. The main focus in this semester is on state-of-the-art characterization, semiconductor processing and devices. |
Lernziel | Basic knowledge of semiconductor physics and technology. Application of this knowledge for state-of-the-art semiconductor device processing |
Inhalt | Semiconductor material characterization (ex situ): Structural and chemical methods (XRD, SEM, TEM, EDX, EELS, SIMS), electronic methods (Hall & quantum Hall effect, transport), optical methods (PL, absorption sepctroscopy); Semiconductor processing: E-beam lithography, optical lithography, structuring of layers and devices (RIE, ICP), thin film deposition (metallization, PECVD, sputtering, ALD); Semiconductor devices: Bipolar and field effect transistors, semiconductor lasers, other devices |
Skript | Link |