402-0317-00L Semiconductor Materials: Fundamentals and Fabrication
Semester | Autumn Semester 2016 |
Lecturers | S. Schön, W. Wegscheider |
Periodicity | yearly recurring course |
Language of instruction | English |
Abstract | This course gives an introduction into the fundamentals of semiconductor materials. The main focus is on state-of-the-art fabrication and characterization methods. The course will be continued in the spring term with a focus on applications. |
Objective | Basic knowledge of semiconductor physics and technology. Application of this knowledge for state-of-the-art semiconductor device processing |
Content | Fundamentals of Solid State Physics: Semiconductor materials, band structures, carrier statistics in intrinsic and doped seminconductors, p-n junctions, low-dimensional structures; Bulk Material growth of Semiconductors: Czochralski method, floating zone method, high pressure synthesis; Semiconductor Epitaxy: Fundamentals, MBE, MOCVD, LPE; In situ characterization: RHEED, LEED, AES, XPS, process control (temperature, thickness) |
Lecture notes | Link |