402-0317-00L  Semiconductor Materials: Fundamentals and Fabrication

SemesterHerbstsemester 2016
DozierendeS. Schön, W. Wegscheider
Periodizitätjährlich wiederkehrende Veranstaltung

KurzbeschreibungThis course gives an introduction into the fundamentals of semiconductor materials. The main focus is on state-of-the-art fabrication and characterization methods. The course will be continued in the spring term with a focus on applications.
LernzielBasic knowledge of semiconductor physics and technology. Application of this knowledge for state-of-the-art semiconductor device processing
InhaltFundamentals of Solid State Physics: Semiconductor materials, band structures, carrier statistics in intrinsic and doped seminconductors, p-n junctions, low-dimensional structures;
Bulk Material growth of Semiconductors: Czochralski method, floating zone method, high pressure synthesis;
Semiconductor Epitaxy: Fundamentals, MBE, MOCVD, LPE;
In situ characterization: RHEED, LEED, AES, XPS, process control (temperature, thickness)