402-0318-00L  Semiconductor Materials: Characterization, Processing and Devices

SemesterSpring Semester 2015
LecturersS. Schön, W. Wegscheider
Periodicityyearly recurring course
Language of instructionEnglish


AbstractThis course gives an introduction into the fundamentals of semiconductor materials. The main focus in this semester is on state-of-the-art characterization, semiconductor processing and devices.
ObjectiveBasic knowledge of semiconductor physics and technology. Application of this knowledge for state-of-the-art semiconductor device processing
ContentSemiconductor material characterization (ex situ): Structural and chemical methods (XRD, SEM, TEM, EDX, EELS, SIMS), electronic methods (Hall & quantum Hall effect, transport), optical methods (PL, absorption sepctroscopy);
Semiconductor processing: E-beam lithography, optical lithography, structuring of layers and devices (RIE, ICP), thin film deposition (metallization, PECVD, sputtering, ALD);
Semiconductor devices: Bipolar and field effect transistors, semiconductor lasers, other devices
Lecture noteshttps://moodle-app2.let.ethz.ch/course/view.php?id=1233