529-0455-00L  Micro- and Nanostructures: Laser Applications in Research and Industry

SemesterAutumn Semester 2014
LecturersT. Lippert
Periodicityyearly recurring course
Language of instructionEnglish



Catalogue data

AbstractIntroduction to the fundamentals of lasers and their applications with an emphasis on micro- and nano-structuring. Several applications which are still in the research state, will be discussed together with industrial applications, such as microlithography and laser welding. Other aspects are the materials that are applied in these applications, e.g. photoresists, and their functioning.
ObjectiveIntroduction to the fundamentals of lasers and their applications with an emphasis on micro- and nano structuring. Several applications which are still in the research state, e.g. non-optical lithographies, will be discussed together with industrial applications, such as microlithography and laser welding. Other aspects are the materials that are applied in these applications, e.g. photoresists, and their functioning.
ContentIntroduction to lasers, Overview of micro- and nanotechnology, microlithography, photoresists: classical types and new developments, laser cutting and welding, laser cleaning, laser ablation, polymer ablation: designed polymers, lasers and surfaces, laser spectroscopy, laser chemical vapor deposition, pulsed laser deposition (PLD), special materials by PLD, alternative structuring methods.
Lecture notesThe script (a copy of the slides) will be handed out during the first lecture.
Literature• D. Bäuerle, Laser Processing and Chemistry, 3rd ed., Springer Verlag 2000.
• D. B. Chrisey, G. K. Hubler, Pulsed Laser Deposition of Thin Films, John Wiley & Sons 1994.
• D. Schuöcker, High Power Lasers in Production Engineering, Imperial College Press 1999.
• E. Beyer, Schweissen mit Laser : Grundlagen, Springer Verlag 1995.
• L. F. Thompson, C. G. Willson, M. J. Bowden, Eds., Introduction to Microlithography, 2nd ed., American Chemical Society 1994.
• J. Mazumder, A. Kar, Theory and Application of Laser Chemical Vapor Deposition, Plenum Press 1995.
• W. Demtroeder, Laser Spectroscopy: Basic Concepts and Intrumentation, 3rd ed., Springer 2003.
• F.K. Kneubühl, M. W. Sigrist, Laser, Teubner Taschenbücher Physik, Stuttgart-Leipzig 1999
• FSRM, CD-ROM: An Introduction to the World of Microsystems, Neuchatel.
• Arbeitskreis Lasertechnik R. Poprawe, CD-ROM: Lasertechnik, Aachen.
• J. Gobrecht, Vorlesungsskript: Grundlagen der Mikro- und Nanotechnik, ETH Zuerich, WS 2001/2002.

Performance assessment

Performance assessment information (valid until the course unit is held again)
Performance assessment as a semester course
ECTS credits2 credits
ExaminersT. Lippert
Typesession examination
Language of examinationEnglish
RepetitionThe performance assessment is offered every session. Repetition possible without re-enrolling for the course unit.
Mode of examinationoral 30 minutes
This information can be updated until the beginning of the semester; information on the examination timetable is binding.

Learning materials

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Only public learning materials are listed.

Courses

NumberTitleHoursLecturers
529-0455-00 VMicro- and Nanostructures: Laser Applications in Research and Industry
Die Vorlesung kann auch in Deutsch gehalten werden (nach Vereinbarung).
2 hrs
Wed10-12HCI D 2 »
T. Lippert

Groups

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Restrictions

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Offered in

ProgrammeSectionType
Doctoral Department of Chemistry and Applied BiosciencesDoctoral Studies in Inorganic ChemistryWInformation