Search result: Catalogue data in Autumn Semester 2020

Micro- and Nanosystems Master Information
Core Courses
Devices and Systems
227-0166-00LAnalog Integrated Circuits Information W6 credits2V + 2UT. Jang
AbstractThis course provides a foundation in analog integrated circuit design based on bipolar and CMOS technologies.
ObjectiveIntegrated circuits are responsible for much of the progress in electronics in the last 50 years, particularly the revolutions in the Information and Communications Technologies we witnessed in recent years. Analog integrated circuits play a crucial part in the highly integrated systems that power the popular electronic devices we use daily. Understanding their design is beneficial to both future designers and users of such systems.
The basic elements, design issues and techniques for analog integrated circuits will be taught in this course.
ContentReview of bipolar and MOS devices and their small-signal equivalent circuit models; Building blocks in analog circuits such as current sources, active load, current mirrors, supply independent biasing etc; Amplifiers: differential amplifiers, cascode amplifier, high gain structures, output stages, gain bandwidth product of op-amps; stability; comparators; second-order effects in analog circuits such as mismatch, noise and offset; data converters; frequency synthesizers; switched capacitors.
The exercise sessions aim to reinforce the lecture material by well guided step-by-step design tasks. The circuit simulator SPECTRE is used to facilitate the tasks. There is also an experimental session on op-amp measurements.
Lecture notesHandouts of presented slides. No script but an accompanying textbook is recommended.
LiteratureBehzad Razavi, Design of Analog CMOS Integrated Circuits (Irwin Electronics & Computer Engineering) 1st or 2nd edition, McGraw-Hill Education
Energy Conversion and Quantum Phenomena
151-0913-00LIntroduction to Photonics Restricted registration - show details W4 credits2V + 2UR. Quidant
AbstractThis course introduces students to the main concepts of optics and photonics. Specifically, we will describe the laws obeyed by optical waves and discuss how to use them to manipulate light.
ObjectivePhotonics, the science of light, has become ubiquitous in our lives. Light control and manipulation is what enables us to interact with the screen of our smart devices and exchange large amount of complex information. Photonics has also taken a preponderant importance in cutting-edge science, allowing for instance to image nanospecimens, detect diseases or sense very tiny forces. The aim of this course is to provide the fundamentals of photonics, establishing a solid basis to more specialized courses. The course will also highlight how these concepts are applied in current research as well as in our everyday life. Content has been designed to be approachable by students from a diverse set of science and engineering backgrounds.
1) General concepts
2) Differential wave Equation
3) Complex formalism
4) Phase
5) Plane waves, spherical waves

1) Maxwell equations
2) Dielectric function
3) Polarisation
4) Polarisation control

1) Waves at an interface
2) Dispersion diagram
3) The Fresnel equations
4) Total internal reflection
5) Evanescent waves

1) Interferences
2) Temporal and spatial coherence
3) Diffraction gratings
4) Multi-wave interference
5) Introduction to holography and its applications

1) Optical waveguide
2) Optical cavity
3) Photonic crystals
4) Metamaterials and metasurfaces

1) Light focusing
2) Direct and Fourier imaging
3) Fluorescence microscopy
4) Nonlinear microscopy
5) Interferential Scattering microscopy
Lecture notesClass notes and handouts
LiteratureOptics (Hecht) - Pearson
Prerequisites / NoticePhysics I, Physics II
402-0595-00LSemiconductor NanostructuresW+6 credits2V + 1UT. M. Ihn
AbstractThe course covers the foundations of semiconductor nanostructures, e.g., materials, band structures, bandgap engineering and doping, field-effect transistors. The physics of the quantum Hall effect and of common nanostructures based on two-dimensional electron gases will be discussed, i.e., quantum point contacts, Aharonov-Bohm rings and quantum dots.
ObjectiveAt the end of the lecture the student should understand four key phenomena of electron transport in semiconductor nanostructures:
1. The integer quantum Hall effect
2. Conductance quantization in quantum point contacts
3. the Aharonov-Bohm effect
4. Coulomb blockade in quantum dots
Content1. Introduction and overview
2. Semiconductor crystals: Fabrication and band structures
3. k.p-theory, effective mass
4. Envelope functions and effective mass approximation, heterostructures and band engineering
5. Fabrication of semiconductor nanostructures
6. Elektrostatics and quantum mechanics of semiconductor nanostructures
7. Heterostructures and two-dimensional electron gases
8. Drude Transport
9. Electron transport in quantum point contacts; Landauer-Büttiker description
10. Ballistic transport experiments
11. Interference effects in Aharonov-Bohm rings
12. Electron in a magnetic field, Shubnikov-de Haas effect
13. Integer quantum Hall effect
14. Coulomb blockade and quantum dots
Lecture notesT. Ihn, Semiconductor Nanostructures, Quantum States and Electronic Transport, Oxford University Press, 2010.
LiteratureIn addition to the lecture notes, the following supplementary books can be recommended:
1. J. H. Davies: The Physics of Low-Dimensional Semiconductors, Cambridge University Press (1998)
2. S. Datta: Electronic Transport in Mesoscopic Systems, Cambridge University Press (1997)
3. D. Ferry: Transport in Nanostructures, Cambridge University Press (1997)
4. T. M. Heinzel: Mesoscopic Electronics in Solid State Nanostructures: an Introduction, Wiley-VCH (2003)
5. Beenakker, van Houten: Quantum Transport in Semiconductor Nanostructures, in: Semiconductor Heterostructures and Nanostructures, Academic Press (1991)
6. Y. Imry: Introduction to Mesoscopic Physics, Oxford University Press (1997)
Prerequisites / NoticeThe lecture is suitable for all physics students beyond the bachelor of science degree. Basic knowledge of solid state physics is a prerequisit. Very ambitioned students in the third year may be able to follow. The lecture can be chosen as part of the PhD-program. The course is taught in English.
Material, Surfaces and Properties
151-0509-00LMicroscale Acoustofluidics Restricted registration - show details W4 credits3GJ. Dual
AbstractIn this lecture the basics as well as practical aspects (from modelling to design and fabrication ) are described from a solid and fluid mechanics perspective with applications to microsystems and lab on a chip devices.
ObjectiveUnderstanding acoustophoresis, the design of devices and potential applications
ContentLinear and nonlinear acoustics, foundations of fluid and solid mechanics and piezoelectricity, Gorkov potential, numerical modelling, acoustic streaming, applications from ultrasonic microrobotics to surface acoustic wave devices
Lecture notesYes, incl. Chapters from the Tutorial: Microscale Acoustofluidics, T. Laurell and A. Lenshof, Ed., Royal Society of Chemistry, 2015
LiteratureMicroscale Acoustofluidics, T. Laurell and A. Lenshof, Ed., Royal Society of Chemistry, 2015
Prerequisites / NoticeSolid and fluid continuum mechanics. Notice: The exercise part is a mixture of presentation, lab sessions ( both compulsary) and hand in homework.
151-0524-00LContinuum Mechanics IW+4 credits2V + 1UE. Mazza
AbstractThe lecture deals with constitutive models that are relevant for design and calculation of structures. These include anisotropic linear elsticity, linear viscoelasticity, plasticity, viscoplasticity. Homogenization theories and laminate theory are presented. Theoretical models are complemented by examples of engineering applications and eperiments.
ObjectiveBasic theories for solving continuum mechanics problems of engineering applications, with particular attention to material models.
ContentAnisotrope Elastizität, Linearelastisches und linearviskoses Stoffverhalten, Viskoelastizität, mikro-makro Modellierung, Laminattheorie, Plastizität, Viscoplastizität, Beispiele aus der Ingenieuranwendung, Vergleich mit Experimenten.
Lecture notesyes
151-0902-00LMicro- and Nanoparticle Technology Restricted registration - show details
Number of participants is limited to 20.
Additional ones could be enrolled by permission of the lecturer.
W6 credits2V + 2US. E. Pratsinis, G. Kelesidis, V. Mavrantzas, K. Wegner
AbstractParticles are everywhere and nano is the new scale in science & engineering as micro was ~200 years ago. For highly motivated students, this exceptionally demanding class gives a flavor of nanotechnology with hands-on student projects on gas-phase particle synthesis & applications capitalizing on particle dynamics (diffusion, coagulation etc.), shape, size distribution and characterization.
ObjectiveThis course aims to familiarize motivated M/BSc students with some of the basic phenomena of particles at the nanoscale, thereby illustrating the links between physics, chemistry, materials science through hands-on experience. Furthermore it aims to give an overview of the field with motivating lectures from industry and academia, including the development of technologies and processes based on particle technology with introduction to design methods of mechanical processes, scale-up laws and optimal use of materials and energy. Most importantly, this course aims to develop the creativity and sharpen the communication skills of motivated students through their individual projects, a PERFECT preparation for the M/BSc thesis (e.g. efficient & critical literature search, effective oral/written project presentations), the future profession itself and even life, in general, are always there!
ContentThe course objectives are best met primarily through the individual student projects which may involve experiments, simulations or critical & quantitative reviews of the literature. Projects are conducted individually under the close supervision of MSc, PhD or post-doctoral students. Therein, a 2-page proposal is submitted within the first two semester weeks addressing explicitly, at least, 10 well-selected research articles and thoughtful meetings with the project supervisor. The proposal address 3 basic questions: a) how important is the project; b) what has been done already in that field and c) what will be done by the student. Detailed feedback on each proposal is given by the supervisor, assistant and professor two weeks later. Towards the end of the semester, a 10-minute oral presentation is given by the student followed by 10 minutes Q&A. A 10-page final report is submitted by noon of the last day of the semester. The project supervisor will provide guidance throughout the course. Lectures include some of the following:
- Overview & Project Presentation
- Particle Size Distribution
- Particle Diffusion
- Coagulation
- Agglomeration & Coalescence
- Particle Growth by Condensation
- Control of particle size & structure during gas-phase synthesis
- Multi-scale design of aerosol synthesis of particles
- Particle Characterization
- Aerosol manufacture of nanoparticles
- Forces acting on Single Particles in a Flow Field
- Fixed and Fluidized Beds
- Separations of Solid-Liquid & Solid-Gas systems
- Emulsions/droplet formation/microfluidics
- Gas Sensors
- Coaching for proposal & report writing as well as oral presentations
LiteratureSmoke, Dust and Haze, S.K. Friedlander, Oxford, 2nd ed., 2000
Aerosol Technology, W. Hinds, Wiley, 2nd Edition, 1999.
Aerosol Processing of Materials, T. Kodas M. Hampden-Smith, Wiley, 1999.
History of the Manufacture of Fine Particles in High-Temperature Aerosol Reactors in Aerosol Science and Technology: History and Reviews, ed. D.S. Ensor & K.N. Lohr, RTI Press, Ch. 18, pp. 475-507, 2011.
Flame aerosol synthesis of smart nanostructured materials, R. Strobel, S. E. Pratsinis, J. Mater. Chem., 17, 4743-4756 (2007).
Prerequisites / NoticeFluidMechanik I, Thermodynamik I&II & "clean" 5th semester BSc student standing in D-MAVT (no block 1 or 2 obligations). Students attending this course are expected to allocate sufficient additional time within their weekly schedule to successfully conduct their project. As exceptional effort will be required! Having seen "Chasing Mavericks" (2012) by Apted & Henson, "Unbroken" (2014) by Angelina Jolie and, in particular, "The Salt of the Earth" (2014) by Wim Wenders might be helpful and even motivating. These movies show how methodic effort can bring superior and truly unexpected results (e.g. stay under water for 5 minutes to overcome the fear of riding huge waves or merciless Olympic athlete training that help survive 45 days on a raft in Pacific Ocean followed by 2 years in a Japanese POW camp during WWII).
327-0505-00LSurfaces, Interfaces and their Applications I Information W3 credits2V + 1UN. Spencer, M. P. Heuberger, L. Isa
AbstractAfter being introduced to the physical/chemical principles and importance of surfaces and interfaces, the student is introduced to the most important techniques that can be used to characterize surfaces. Later, liquid interfaces are treated, followed by an introduction to the fields of tribology (friction, lubrication, and wear) and corrosion.
ObjectiveTo gain an understanding of the physical and chemical principles, as well as the tools and applications of surface science, and to be able to choose appropriate surface-analytical approaches for solving problems.
ContentIntroduction to Surface Science
Physical Structure of Surfaces
Surface Forces (static and dynamic)
Adsorbates on Surfaces
Surface Thermodynamics and Kinetics
The Solid-Liquid Interface
Electron Spectroscopy
Vibrational Spectroscopy on Surfaces
Scanning Probe Microscopy
Introduction to Tribology
Introduction to Corrosion Science
Lecture notesScript Download:
LiteratureScript on Moodle
Book: "Surface Analysis--The Principal Techniques", Ed. J.C. Vickerman, Wiley, ISBN 0-471-97292
Prerequisites / NoticeChemistry:
General undergraduate chemistry
including basic chemical kinetics and thermodynamics

General undergraduate physics
including basic theory of diffraction and basic knowledge of crystal structures
Modelling and Simulation
151-0107-20LHigh Performance Computing for Science and Engineering (HPCSE) I Information W4 credits4GP. Koumoutsakos, S. M. Martin
AbstractThis course gives an introduction into algorithms and numerical methods for parallel computing on shared and distributed memory architectures. The algorithms and methods are supported with problems that appear frequently in science and engineering.
ObjectiveWith manufacturing processes reaching its limits in terms of transistor density on today’s computing architectures, efficient utilization of computing resources must include parallel execution to maintain scaling. The use of computers in academia, industry and society is a fundamental tool for problem solving today while the “think parallel” mind-set of developers is still lagging behind.

The aim of the course is to introduce the student to the fundamentals of parallel programming using shared and distributed memory programming models. The goal is on learning to apply these techniques with the help of examples frequently found in science and engineering and to deploy them on large scale high performance computing (HPC) architectures.
Content1. Hardware and Architecture: Moore’s Law, Instruction set architectures (MIPS, RISC, CISC), Instruction pipelines, Caches, Flynn’s taxonomy, Vector instructions (for Intel x86)

2. Shared memory parallelism: Threads, Memory models, Cache coherency, Mutual exclusion, Uniform and Non-Uniform memory access, Open Multi-Processing (OpenMP)

3. Distributed memory parallelism: Message Passing Interface (MPI), Point-to-Point and collective communication, Blocking and non-blocking methods, Parallel file I/O, Hybrid programming models

4. Performance and parallel efficiency analysis: Performance analysis of algorithms, Roofline model, Amdahl’s Law, Strong and weak scaling analysis

5. Applications: HPC Math libraries, Linear Algebra and matrix/vector operations, Singular value decomposition, Neural Networks and linear autoencoders, Solving partial differential equations (PDEs) using grid-based and particle methods
Lecture notes
Class notes, handouts
Literature• An Introduction to Parallel Programming, P. Pacheco, Morgan Kaufmann
• Introduction to High Performance Computing for Scientists and Engineers, G. Hager and G. Wellein, CRC Press
• Computer Organization and Design, D.H. Patterson and J.L. Hennessy, Morgan Kaufmann
• Vortex Methods, G.H. Cottet and P. Koumoutsakos, Cambridge University Press
• Lecture notes
Prerequisites / NoticeStudents should be familiar with a compiled programming language (C, C++ or Fortran). Exercises and exams will be designed using C++. The course will not teach basics of programming. Some familiarity using the command line is assumed. Students should also have a basic understanding of diffusion and advection processes, as well as their underlying partial differential equations.
227-2037-00LPhysical Modelling and SimulationW+6 credits4GJ. Smajic
AbstractThis module consists of (a) an introduction to fundamental equations of electromagnetics, mechanics and heat transfer, (b) a detailed overview of numerical methods for field simulations, and (c) practical examples solved in form of small projects.
ObjectiveBasic knowledge of the fundamental equations and effects of electromagnetics, mechanics, and heat transfer. Knowledge of the main concepts of numerical methods for physical modelling and simulation. Ability (a) to develop own simple field simulation programs, (b) to select an appropriate field solver for a given problem, (c) to perform field simulations, (d) to evaluate the obtained results, and (e) to interactively improve the models until sufficiently accurate results are obtained.
ContentThe module begins with an introduction to the fundamental equations and effects of electromagnetics, mechanics, and heat transfer. After the introduction follows a detailed overview of the available numerical methods for solving electromagnetic, thermal and mechanical boundary value problems. This part of the course contains a general introduction into numerical methods, differential and integral forms, linear equation systems, Finite Difference Method (FDM), Boundary Element Method (BEM), Method of Moments (MoM), Multiple Multipole Program (MMP) and Finite Element Method (FEM). The theoretical part of the course finishes with a presentation of multiphysics simulations through several practical examples of HF-engineering such as coupled electromagnetic-mechanical and electromagnetic-thermal analysis of MEMS.
In the second part of the course the students will work in small groups on practical simulation problems. For solving practical problems the students can develop and use own simulation programs or chose an appropriate commercial field solver for their specific problem. This practical simulation work of the students is supervised by the lecturers.
Laboratory Course
151-0620-00LEmbedded MEMS LabW+5 credits3PC. Hierold, S. Blunier, M. Haluska
AbstractPractical course: Students are introduced to the process steps required for the fabrication of MEMS (Micro Electro Mechanical System) and carry out the fabrication and testing steps in the clean rooms by themselves. Additionally, they learn the requirements for working in clean rooms. Processing and characterization will be documented and analyzed in a final report. Limited access
ObjectiveStudents learn the individual process steps that are required to make a MEMS (Micro Electro Mechanical System). Students carry out the process steps themselves in laboratories and clean rooms. Furthermore, participants become familiar with the special requirements (cleanliness, safety, operation of equipment and handling hazardous chemicals) of working in the clean rooms and laboratories. The entire production, processing, and characterization of the MEMS is documented and evaluated in a final report.
ContentWith guidance from a tutor, the individual silicon microsystem process steps that are required for the fabrication of an accelerometer are carried out:
- Photolithography, dry etching, wet etching, sacrificial layer etching, various cleaning procedures
- Packaging and electrical connection of a MEMS device
- Testing and characterization of the MEMS device
- Written documentation and evaluation of the entire production, processing and characterization
Lecture notesA document containing theory, background and practical course content is distributed at the Introductory lecture day of the course.
LiteratureThe document provides sufficient information for the participants to successfully participate in the course.
Prerequisites / NoticeParticipating students are required to attend all scheduled lectures and meetings of the course.

Participating students are required to provide proof that they have personal accident insurance prior to the start of the laboratory portion of the course.

For safety and efficiency reasons the number of participating students is limited. We regret to restrict access to this course by the following rules:

Priority 1: master students of the master's program in "Micro and Nanosystems"

Priority 2: master students of the master's program in "Mechanical Engineering" with a specialization in Microsystems and Nanoscale Engineering (MAVT-tutors Profs Daraio, Dual, Hierold, Koumoutsakos, Nelson, Norris, Poulikakos, Pratsinis, Stemmer), who attended the bachelor course "151-0621-00L Microsystems Technology" successfully.

Priority 3: master students, who attended the bachelor course "151-0621-00L Microsystems Technology" successfully.

Priority 4: all other students (PhD, bachelor, master) with a background in silicon or microsystems process technology.

If there are more students in one of these priority groups than places available, we will decide by (in following order) best achieved grade from 151-0621-00L Microsystems Technology, registration to this practicum at previous semester, and by drawing lots.
Students will be notified at the first lecture of the course (introductory lecture) as to whether they are able to participate.

The course is offered in autumn and spring semester.
Elective Core Courses
151-0525-00LDynamic Behavior of Materials
“Note: previous course title until HS19 "Wave Propagation in Solids".
W4 credits2V + 2UD. Mohr, C. Roth, T. Tancogne-Dejean
AbstractLectures and computer labs concerned with the modeling of the deformation response and failure of engineering materials (metals, polymers and composites) subject to extreme loadings during manufacturing, crash, impact and blast events.
ObjectiveStudents will learn to apply, understand and develop computational models of a large spectrum of engineering materials to predict their dynamic deformation response and failure in finite element simulations. Students will become familiar with important dynamic testing techniques to identify material model parameters from experiments. The ultimate goal is to provide the students with the knowledge and skills required to engineer modern multi-material solutions for high performance structures in automotive, aerospace and naval engineering.
ContentTopics include viscoelasticity, temperature and rate dependent plasticity, dynamic brittle and ductile fracture; impulse transfer, impact and wave propagation in solids; computational aspects of material model implementation into hydrocodes; simulation of dynamic failure of structures;
Lecture notesSlides of the lectures, relevant journal papers and user manuals will be provided.
LiteratureVarious books will be recommended pertaining to the topics covered.
Prerequisites / NoticeCourse in continuum mechanics (mandatory), finite element method (recommended)
151-0532-00LNonlinear Dynamics and Chaos I Information W4 credits2V + 2UG. Haller
AbstractBasic facts about nonlinear systems; stability and near-equilibrium dynamics; bifurcations; dynamical systems on the plane; non-autonomous dynamical systems; chaotic dynamics.
ObjectiveThis course is intended for Masters and Ph.D. students in engineering sciences, physics and applied mathematics who are interested in the behavior of nonlinear dynamical systems. It offers an introduction to the qualitative study of nonlinear physical phenomena modeled by differential equations or discrete maps. We discuss applications in classical mechanics, electrical engineering, fluid mechanics, and biology. A more advanced Part II of this class is offered every other year.
Content(1) Basic facts about nonlinear systems: Existence, uniqueness, and dependence on initial data.

(2) Near equilibrium dynamics: Linear and Lyapunov stability

(3) Bifurcations of equilibria: Center manifolds, normal forms, and elementary bifurcations

(4) Nonlinear dynamical systems on the plane: Phase plane techniques, limit sets, and limit cycles.

(5) Time-dependent dynamical systems: Floquet theory, Poincare maps, averaging methods, resonance
Lecture notesThe class lecture notes will be posted electronically after each lecture. Students should not rely on these but prepare their own notes during the lecture.
Prerequisites / Notice- Prerequisites: Analysis, linear algebra and a basic course in differential equations.

- Exam: two-hour written exam in English.

- Homework: A homework assignment will be due roughly every other week. Hints to solutions will be posted after the homework due dates.
151-0593-00LEmbedded Control Systems
Does not take place this semester.
W4 credits6G
AbstractThis course provides a comprehensive overview of embedded control systems. The concepts introduced are implemented and verified on a microprocessor-controlled haptic device.
ObjectiveFamiliarize students with main architectural principles and concepts of embedded control systems.
ContentAn embedded system is a microprocessor used as a component in another piece of technology, such as cell phones or automobiles. In this intensive two-week block course the students are presented the principles of embedded digital control systems using a haptic device as an example for a mechatronic system. A haptic interface allows for a human to interact with a computer through the sense of touch.

Subjects covered in lectures and practical lab exercises include:
- The application of C-programming on a microprocessor
- Digital I/O and serial communication
- Quadrature decoding for wheel position sensing
- Queued analog-to-digital conversion to interface with the analog world
- Pulse width modulation
- Timer interrupts to create sampling time intervals
- System dynamics and virtual worlds with haptic feedback
- Introduction to rapid prototyping
Lecture notesLecture notes, lab instructions, supplemental material
Prerequisites / NoticePrerequisite courses are Control Systems I and Informatics I.

This course is restricted to 33 students due to limited lab infrastructure. Interested students please contact Marianne Schmid (E-Mail:
After your reservation has been confirmed please register online at

Detailed information can be found on the course website
151-0605-00LNanosystemsW4 credits4GA. Stemmer
AbstractFrom atoms to molecules to condensed matter: characteristic properties of simple nanosystems and how they evolve when moving towards complex ensembles.
Intermolecular forces, their macroscopic manifestations, and ways to control such interactions.
Self-assembly and directed assembly of 2D and 3D structures.
Special emphasis on the emerging field of molecular electronic devices.
ObjectiveFamiliarize students with basic science and engineering principles governing the nano domain.
ContentThe course addresses basic science and engineering principles ruling the nano domain. We particularly work out the links between topics that are traditionally taught separately. Familiarity with basic concepts of quantum mechanics is expected.

Special emphasis is placed on the emerging field of molecular electronic devices, their working principles, applications, and how they may be assembled.

Topics are treated in 2 blocks:

(I) From Quantum to Continuum
From atoms to molecules to condensed matter: characteristic properties of simple nanosystems and how they evolve when moving towards complex ensembles.

(II) Interaction Forces on the Micro and Nano Scale
Intermolecular forces, their macroscopic manifestations, and ways to control such interactions.
Self-assembly and directed assembly of 2D and 3D structures.
Literature- Kuhn, Hans; Försterling, H.D.: Principles of Physical Chemistry. Understanding Molecules, Molecular Assemblies, Supramolecular Machines. 1999, Wiley, ISBN: 0-471-95902-2
- Chen, Gang: Nanoscale Energy Transport and Conversion. 2005, Oxford University Press, ISBN: 978-0-19-515942-4
- Ouisse, Thierry: Electron Transport in Nanostructures and Mesoscopic Devices. 2008, Wiley, ISBN: 978-1-84821-050-9
- Wolf, Edward L.: Nanophysics and Nanotechnology. 2004, Wiley-VCH, ISBN: 3-527-40407-4

- Israelachvili, Jacob N.: Intermolecular and Surface Forces. 2nd ed., 1992, Academic Press,ISBN: 0-12-375181-0
- Evans, D.F.; Wennerstrom, H.: The Colloidal Domain. Where Physics, Chemistry, Biology, and Technology Meet. Advances in Interfacial Engineering Series. 2nd ed., 1999, Wiley, ISBN: 0-471-24247-0
- Hunter, Robert J.: Foundations of Colloid Science. 2nd ed., 2001, Oxford, ISBN: 0-19-850502-7
Prerequisites / NoticeCourse format:

Lectures and Mini-Review presentations: Thursday 10-13, ML F 36

Homework: Mini-Review
(compulsory continuous performance assessment)

Each student selects a paper (list distributed in class) and expands the topic into a Mini-Review that illuminates the particular field beyond the immediate results reported in the paper. Each Mini-Review will be presented both orally and as a written paper.
151-0621-00LMicrosystems I: Process Technology and IntegrationW6 credits3V + 3UM. Haluska, C. Hierold
AbstractStudents are introduced to the fundamentals of semiconductors, the basics of micromachining and silicon process technology and will learn about the fabrication of microsystems and -devices by a sequence of defined processing steps (process flow).
ObjectiveStudents are introduced to the basics of micromachining and silicon process technology and will understand the fabrication of microsystem devices by the combination of unit process steps ( = process flow).
Content- Introduction to microsystems technology (MST) and micro electro mechanical systems (MEMS)
- Basic silicon technologies: Thermal oxidation, photolithography and etching, diffusion and ion implantation, thin film deposition.
- Specific microsystems technologies: Bulk and surface micromachining, dry and wet etching, isotropic and anisotropic etching, beam and membrane formation, wafer bonding, thin film mechanical properties.
Application of selected technologies will be demonstrated on case studies.
Lecture notesHandouts (available online)
Literature- S.M. Sze: Semiconductor Devices, Physics and Technology
- W. Menz, J. Mohr, O.Paul: Microsystem Technology
- Hong Xiao: Introduction to Semiconductor Manufacturing Technology
- M. J. Madou: Fundamentals of Microfabrication and Nanotechnology, 3rd ed.
- T. M. Adams, R. A. Layton: Introductory MEMS, Fabrication and Applications
Prerequisites / NoticePrerequisites: Physics I and II
151-0642-00LSeminar on Micro and NanosystemsZ0 credits1SC. Hierold
AbstractScientific presentations from the field of Micro- and Nanosystems
ObjectiveIn particular, the seminar addresses students, who are interested in scientific work in the field of Micro- and Nanosystem technologies, or who have started already with it. Respectively, current examples in the research will be discussed.
ContentCurrent themes in the field of Micro- and Nanosystem technologies using the examples of intern and extern research groups, as well as ongoing themes of study-, diplom- and doctoral thesis will be introduced and discussed. The scope of the seminar is broadened by occasional guest speakers.
Lecture notes-
Prerequisites / NoticeMaster of MNS, MAVT, ITET, Physics
151-0911-00LIntroduction to Plasmonics Information W4 credits2V + 1UD. J. Norris
AbstractThis course provides fundamental knowledge of surface plasmon polaritons and discusses their applications in plasmonics.
ObjectiveElectromagnetic oscillations known as surface plasmon polaritons have many unique properties that are useful across a broad set of applications in biology, chemistry, physics, and optics. The field of plasmonics has arisen to understand the behavior of surface plasmon polaritons and to develop applications in areas such as catalysis, imaging, photovoltaics, and sensing. In particular, metallic nanoparticles and patterned metallic interfaces have been developed to utilize plasmonic resonances. The aim of this course is to provide the basic knowledge to understand and apply the principles of plasmonics. The course will strive to be approachable to students from a diverse set of science and engineering backgrounds.
ContentFundamentals of Plasmonics
- Basic electromagnetic theory
- Optical properties of metals
- Surface plasmon polaritons on surfaces
- Surface plasmon polariton propagation
- Localized surface plasmons

Applications of Plasmonics
- Waveguides
- Extraordinary optical transmission
- Enhanced spectroscopy
- Sensing
- Metamaterials
Lecture notesClass notes and handouts
LiteratureS. A. Maier, Plasmonics: Fundamentals and Applications, 2007, Springer
Prerequisites / NoticePhysics I, Physics II
227-0145-00LSolid State Electronics and Optics Information W6 credits4GN. Yazdani, V. Wood
Abstract"Solid State Electronics" is an introductory condensed matter physics course covering crystal structure, electron models, classification of metals, semiconductors, and insulators, band structure engineering, thermal and electronic transport in solids, magnetoresistance, and optical properties of solids.
ObjectiveUnderstand the fundamental physics behind the mechanical, thermal, electric, magnetic, and optical properties of materials.
Prerequisites / NoticeRecommended background:
Undergraduate physics, mathematics, semiconductor devices
227-0157-00LSemiconductor Devices: Physical Bases and Simulation Information W4 credits3GA. Schenk
AbstractThe course addresses the physical principles of modern semiconductor devices and the foundations of their modeling and numerical simulation. Necessary basic knowledge on quantum-mechanics, semiconductor physics and device physics is provided. Computer simulations of the most important devices and of interesting physical effects supplement the lectures.
ObjectiveThe course aims at the understanding of the principle physics of modern semiconductor devices, of the foundations in the physical modeling of transport and its numerical simulation. During the course also basic knowledge on quantum-mechanics, semiconductor physics and device physics is provided.
ContentThe main topics are: transport models for semiconductor devices (quantum transport, Boltzmann equation, drift-diffusion model, hydrodynamic model), physical characterization of silicon (intrinsic properties, scattering processes), mobility of cold and hot carriers, recombination (Shockley-Read-Hall statistics, Auger recombination), impact ionization, metal-semiconductor contact, metal-insulator-semiconductor structure, and heterojunctions.
The exercises are focussed on the theory and the basic understanding of the operation of special devices, as single-electron transistor, resonant tunneling diode, pn-diode, bipolar transistor, MOSFET, and laser. Numerical simulations of such devices are performed with an advanced simulation package (Sentaurus-Synopsys). This enables to understand the physical effects by means of computer experiments.
Lecture notesThe script (in book style) can be downloaded from:
LiteratureThe script (in book style) is sufficient. Further reading will be recommended in the lecture.
Prerequisites / NoticeQualifications: Physics I+II, Semiconductor devices (4. semester).
227-0158-00LSemiconductor Devices: Transport Theory and Monte Carlo Simulation Information
Does not take place this semester.
The course was offered for the last time in HS19.
W4 credits2G
AbstractThe lecture combines quasi-ballistic transport theory with application to realistic devices
of current and future CMOS technology.
All aspects such as quantum mechanics, phonon scattering or Monte Carlo techniques to
solve the Boltzmann equation are introduced. In the exercises advanced devices such
as FinFETs and nanosheets are simulated.
ObjectiveThe aim of the course is a fundamental understanding of the derivation of the Boltzmann
equation and its solution by Monte Carlo methods. The practical aspect is to become
familiar with technology computer-aided design (TCAD) and perform simulations of
advanced CMOS devices.
ContentThe covered topics include:
- quantum mechanics and second quantization,
- band structure calculation including the pseudopotential method
- phonons
- derivation of the Boltzmann equation including scattering in the Markov limit
- stochastic Monte Carlo techniques to solve the Boltzmann equation
- TCAD environment and geometry generation
- Stationary bulk Monte Carlo simulation of velocity-field curves
- Transient Monte Carlo simulation for quasi-ballistic velocity overshoot
- Monte Carlo device simulation of FinFETs and nanosheets
Lecture notesLecture notes (in German)
LiteratureFurther reading will be recommended in the lecture.
Prerequisites / NoticeKnowledge of quantum mechanics is not required. Basic knowledge of semiconductor
physics is useful, but not necessary.
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