151-0621-00L Microsystems I: Process Technology and Integration
| Semester | Autumn Semester 2023 |
| Lecturers | M. Haluska, C. Hierold |
| Periodicity | yearly recurring course |
| Language of instruction | English |
| Number | Title | Hours | Lecturers | ||||
|---|---|---|---|---|---|---|---|
| 151-0621-00 V | Microsystems I: Process Technology and Integration The lecture starts in the second week of the Semester. | 3 hrs |
| C. Hierold, M. Haluska | |||
| 151-0621-00 U | Microsystems I: Process Technology and Integration The exercise starts in the third week of the Semester. | 2 hrs |
| M. Haluska |