151-0621-00L Microsystems I: Process Technology and Integration
| Semester | Herbstsemester 2021 |
| Dozierende | M. Haluska, C. Hierold |
| Periodizität | jährlich wiederkehrende Veranstaltung |
| Lehrsprache | Englisch |
| Nummer | Titel | Umfang | Dozierende | ||||
|---|---|---|---|---|---|---|---|
| 151-0621-00 V | Microsystems I: Process Technology and Integration The lecture starts in the second week of the Semester. | 3 Std. |
| C. Hierold, M. Haluska | |||
| 151-0621-00 U | Microsystems I: Process Technology and Integration The exercise starts in the third week of the Semester. | 3 Std. |
| M. Haluska |

